TY - JOUR
T1 - Van Der Waals Metal Contacts for Electronic and Optoelectronic Devices
AU - Lee, Joo Hong
AU - Choi, Seung Gu
AU - Lee, Jin Wook
N1 - Publisher Copyright:
© 2023 American Chemical Society.
PY - 2023/4/25
Y1 - 2023/4/25
N2 - For the fabrication of thin-film electronics, conventional physical vapor deposition (PVD) processes have been widely used to form metal contacts on various thin films. However, the PVD process, involving thermally activated high-energy metal atoms, damages the underlying thin films, severely deteriorating the performance and stability of the device. The van der Waals (vdW) metal-contact approach has recently emerged to avoid this issue. By transferring predeposited metal contacts using vdW interactions, atomically sharp and electronically clean heterointerfaces can be formed without generating unintended defects. In this article, we review the fundamentals, processes, and various applications of the vdW metal-integration approach. The classical theory of vdW interactions is first reviewed, followed by the introduction of various approaches for constructing vdW metal contacts on thin films. Subsequently, the influence of contact configuration on the performance of various applications is summarized. Finally, the remaining challenges and prospects are discussed for the practical usage and versatile application of vdW metal contacts for next-generation electronic devices.
AB - For the fabrication of thin-film electronics, conventional physical vapor deposition (PVD) processes have been widely used to form metal contacts on various thin films. However, the PVD process, involving thermally activated high-energy metal atoms, damages the underlying thin films, severely deteriorating the performance and stability of the device. The van der Waals (vdW) metal-contact approach has recently emerged to avoid this issue. By transferring predeposited metal contacts using vdW interactions, atomically sharp and electronically clean heterointerfaces can be formed without generating unintended defects. In this article, we review the fundamentals, processes, and various applications of the vdW metal-integration approach. The classical theory of vdW interactions is first reviewed, followed by the introduction of various approaches for constructing vdW metal contacts on thin films. Subsequently, the influence of contact configuration on the performance of various applications is summarized. Finally, the remaining challenges and prospects are discussed for the practical usage and versatile application of vdW metal contacts for next-generation electronic devices.
KW - Fermi-level pinning
KW - metal contact
KW - physical vapor deposition
KW - thin film electronics
KW - van der Waals interaction
UR - https://www.scopus.com/pages/publications/85151295726
U2 - 10.1021/acsaelm.2c01789
DO - 10.1021/acsaelm.2c01789
M3 - Article
AN - SCOPUS:85151295726
SN - 2637-6113
VL - 5
SP - 1903
EP - 1925
JO - ACS Applied Electronic Materials
JF - ACS Applied Electronic Materials
IS - 4
ER -