Abstract
A hydrous oxide film for the application as dielectric film is synthesized by immersion of pure aluminum in hot water. From a Rutherford backscattering analysis, the ratio of aluminum to oxygen atoms was found to be 3:2 in the anodized aluminum oxide film, and 2:1 in the hydrous oxide layer. Anodization of the hydrous oxide layer was more effective for the transition of amorphous anodic oxides to the crystalline aluminum oxides.
| Original language | English |
|---|---|
| Pages (from-to) | 314-317 |
| Number of pages | 4 |
| Journal | Materials Science and Engineering: A |
| Volume | 448-451 |
| DOIs | |
| State | Published - 25 Mar 2007 |
Keywords
- Anodization
- Boehmite
- Dielectric layer
- Hydrous layer
- RBS