Thin film supercapacitors using a sputtered RuO2 electrode

Jae Hong Lim; Doo Jin Choi; Han Ki Kim; Won I.I. Cho; Young Soo Yoon

doi:10.1149/1.1350666

Thin film supercapacitors using a sputtered RuO₂ electrode

Jae Hong Lim
, Doo Jin Choi
, Han Ki Kim
, Won I.I. Cho
, Young Soo Yoon

Yonsei University

Research output: Contribution to journal › Article › peer-review

80 Scopus citations

Abstract

An all solid-state thin film supercapacitor (TFSC) was fabricated with an amorphous ruthenium oxide (RuO₂) thin film electrode and an amorphous Li_xPO_yN_z (Lipon) thin film electrolyte. The electrochemical behavior of the RuO₂/Lipon/RuO₂ /Pt TFSC was characterized by a charge-discharge technique in the potential range of 0-2 V. The RuO₂/Lipon/RuO₂/Pt TFSC exhibited a behavior of a bulk-type supercapacitor, even though the capacity of an as-fabricated TFSC was found to be much lower than the bulk one and showed a rapid decrease in capacity. This can be explained by excess oxygen ions and interfacial structure modification. The discharge yield dropped by 53% after 500 cycles. The capacitance per volume of the RuO₂/Lipon/RuO₂ /Pt TFSC at the first cycle is 38 mF/cm² μm.

Original language	English
Pages (from-to)	A275-A278
Journal	Journal of the Electrochemical Society
Volume	148
Issue number	3
DOIs	https://doi.org/10.1149/1.1350666
State	Published - 2001
Externally published	Yes

Access to Document

10.1149/1.1350666

Cite this

@article{4f02ff84c8314d7e82726a1e058b8ebb,

title = "Thin film supercapacitors using a sputtered RuO2 electrode",

abstract = "An all solid-state thin film supercapacitor (TFSC) was fabricated with an amorphous ruthenium oxide (RuO2) thin film electrode and an amorphous LixPOyNz (Lipon) thin film electrolyte. The electrochemical behavior of the RuO2/Lipon/RuO2 /Pt TFSC was characterized by a charge-discharge technique in the potential range of 0-2 V. The RuO2/Lipon/RuO2/Pt TFSC exhibited a behavior of a bulk-type supercapacitor, even though the capacity of an as-fabricated TFSC was found to be much lower than the bulk one and showed a rapid decrease in capacity. This can be explained by excess oxygen ions and interfacial structure modification. The discharge yield dropped by 53\% after 500 cycles. The capacitance per volume of the RuO2/Lipon/RuO2 /Pt TFSC at the first cycle is 38 mF/cm2 μm.",

author = "Lim, \{Jae Hong\} and Choi, \{Doo Jin\} and Kim, \{Han Ki\} and Cho, \{Won I.I.\} and Yoon, \{Young Soo\}",

year = "2001",

doi = "10.1149/1.1350666",

language = "English",

volume = "148",

pages = "A275--A278",

journal = "Journal of the Electrochemical Society",

issn = "0013-4651",

publisher = "Institute of Physics",

number = "3",

}

TY - JOUR

T1 - Thin film supercapacitors using a sputtered RuO2 electrode

AU - Lim, Jae Hong

AU - Choi, Doo Jin

AU - Kim, Han Ki

AU - Cho, Won I.I.

AU - Yoon, Young Soo

PY - 2001

Y1 - 2001

N2 - An all solid-state thin film supercapacitor (TFSC) was fabricated with an amorphous ruthenium oxide (RuO2) thin film electrode and an amorphous LixPOyNz (Lipon) thin film electrolyte. The electrochemical behavior of the RuO2/Lipon/RuO2 /Pt TFSC was characterized by a charge-discharge technique in the potential range of 0-2 V. The RuO2/Lipon/RuO2/Pt TFSC exhibited a behavior of a bulk-type supercapacitor, even though the capacity of an as-fabricated TFSC was found to be much lower than the bulk one and showed a rapid decrease in capacity. This can be explained by excess oxygen ions and interfacial structure modification. The discharge yield dropped by 53% after 500 cycles. The capacitance per volume of the RuO2/Lipon/RuO2 /Pt TFSC at the first cycle is 38 mF/cm2 μm.

AB - An all solid-state thin film supercapacitor (TFSC) was fabricated with an amorphous ruthenium oxide (RuO2) thin film electrode and an amorphous LixPOyNz (Lipon) thin film electrolyte. The electrochemical behavior of the RuO2/Lipon/RuO2 /Pt TFSC was characterized by a charge-discharge technique in the potential range of 0-2 V. The RuO2/Lipon/RuO2/Pt TFSC exhibited a behavior of a bulk-type supercapacitor, even though the capacity of an as-fabricated TFSC was found to be much lower than the bulk one and showed a rapid decrease in capacity. This can be explained by excess oxygen ions and interfacial structure modification. The discharge yield dropped by 53% after 500 cycles. The capacitance per volume of the RuO2/Lipon/RuO2 /Pt TFSC at the first cycle is 38 mF/cm2 μm.

UR - https://www.scopus.com/pages/publications/0000662429

U2 - 10.1149/1.1350666

DO - 10.1149/1.1350666

M3 - Article

AN - SCOPUS:0000662429

SN - 0013-4651

VL - 148

SP - A275-A278

JO - Journal of the Electrochemical Society

JF - Journal of the Electrochemical Society

IS - 3

ER -

Thin film supercapacitors using a sputtered RuO₂ electrode

Abstract

Access to Document

Other files and links

Fingerprint

Cite this