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Thin film passivation for organic light emitting diodes with SiON/Ag/SiON multilayer grown on flexible PES substrate by roll-to-roll sputtering system

  • Chung Ki Cho
  • , Yong Seok Park
  • , Jin A. Jeong
  • , Han Ki Kim
  • Kyung Hee University

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

We have investigated the characteristics of SiON/Ag/SiON multilayer passivation grown by specially designed roll-to-roll (RTR) sputtering system using the PES substrate for organic light emitting diodes. The SiON/Ag/SiON multilayer thin film passivation on a PES substrate had a high transmittance of 87.7 % and low water vapor transmission rate (WVTR) had low value at optimized conditions. Using field emission scanning electron microscope (FESEM) examinations. This indicates that a SiON/Ag/SiON multilayer passivation is a promising thin film passivation scheme for organic light emitting diodes.

Original languageEnglish
Title of host publication10th International Meeting on Information Display and International Display Manufacturing Conference and Asia Display 2010, IMID/IDMC/ASIA Display 2010
Pages834-835
Number of pages2
StatePublished - 2010
Externally publishedYes
Event10th International Meeting on Information Display and International Display Manufacturing Conference and Asia Display 2010, IMID/IDMC/ASIA Display 2010 - Seoul, Korea, Republic of
Duration: 11 Oct 201015 Oct 2010

Publication series

NameProceedings of International Meeting on Information Display
ISSN (Print)1738-7558

Conference

Conference10th International Meeting on Information Display and International Display Manufacturing Conference and Asia Display 2010, IMID/IDMC/ASIA Display 2010
Country/TerritoryKorea, Republic of
CitySeoul
Period11/10/1015/10/10

Keywords

  • OLED
  • Passivation
  • Roll-to-roll
  • SiON/Ag/SiON

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