Thickness dependence on crystalline structure and interfacial reactions in HfO2 films on InP (001) grown by atomic layer deposition

  • Y. S. Kang
  • , C. Y. Kim
  • , M. H. Cho
  • , K. B. Chung
  • , C. H. An
  • , H. Kim
  • , H. J. Lee
  • , C. S. Kim
  • , T. G. Lee

Research output: Contribution to journal › Article › peer-review

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