Thermodynamic Stability of RuO2Bottom Electrodes and Their Effect on the Ba-Sr-Ti Oxide Film Quality

Youn Jin Oh; Sang Heup Moon; Chan Hwa Chung

doi:10.1149/1.1355689

Thermodynamic Stability of RuO₂Bottom Electrodes and Their Effect on the Ba-Sr-Ti Oxide Film Quality

Youn Jin Oh, Sang Heup Moon, Chan Hwa Chung

Department of Chemical Engineering

Research output: Contribution to journal › Article › peer-review

14 Scopus citations

Abstract

We have performed calculations to evaluate the thermodynamic stability of RuO₂film and its effect on (Ba, Sr)TiO₃(BST) film quality when it is deposited on RuO₂thin film by metallorganic chemical vapor deposition. RuO₂is rather stable when it is annealed in oxygen ambient. However, it was etched by gaseous oxygen when too much oxygen was fed at high temperatures. The degradation of RuO₂occurs in two different reaction pathways depending on process conditions. One is the thermal decomposition of RuO₂that mainly happens when no excess O₂is present in the feed at low pressures. The other is the etching of RuO₂film by excess O₂, which produces gaseous RuO₃and RuO₄species. The calculation results on the Ba-Sr-Ti-Ru-C-H-O system also present optimal feed composition and process conditions that result in high-quality (Ba, Sr)TiO₃film.

Original language	English
Pages (from-to)	F56-F62
Journal	Journal of the Electrochemical Society
Volume	148
Issue number	4
DOIs	https://doi.org/10.1149/1.1355689
State	Published - 1 Apr 2001

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title = "Thermodynamic Stability of RuO2Bottom Electrodes and Their Effect on the Ba-Sr-Ti Oxide Film Quality",

abstract = "We have performed calculations to evaluate the thermodynamic stability of RuO2film and its effect on (Ba, Sr)TiO3(BST) film quality when it is deposited on RuO2thin film by metallorganic chemical vapor deposition. RuO2is rather stable when it is annealed in oxygen ambient. However, it was etched by gaseous oxygen when too much oxygen was fed at high temperatures. The degradation of RuO2occurs in two different reaction pathways depending on process conditions. One is the thermal decomposition of RuO2that mainly happens when no excess O2is present in the feed at low pressures. The other is the etching of RuO2film by excess O2, which produces gaseous RuO3and RuO4species. The calculation results on the Ba-Sr-Ti-Ru-C-H-O system also present optimal feed composition and process conditions that result in high-quality (Ba, Sr)TiO3film.",

author = "Oh, \{Youn Jin\} and Moon, \{Sang Heup\} and Chung, \{Chan Hwa\}",

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T1 - Thermodynamic Stability of RuO2Bottom Electrodes and Their Effect on the Ba-Sr-Ti Oxide Film Quality

AU - Oh, Youn Jin

AU - Moon, Sang Heup

AU - Chung, Chan Hwa

PY - 2001/4/1

Y1 - 2001/4/1

N2 - We have performed calculations to evaluate the thermodynamic stability of RuO2film and its effect on (Ba, Sr)TiO3(BST) film quality when it is deposited on RuO2thin film by metallorganic chemical vapor deposition. RuO2is rather stable when it is annealed in oxygen ambient. However, it was etched by gaseous oxygen when too much oxygen was fed at high temperatures. The degradation of RuO2occurs in two different reaction pathways depending on process conditions. One is the thermal decomposition of RuO2that mainly happens when no excess O2is present in the feed at low pressures. The other is the etching of RuO2film by excess O2, which produces gaseous RuO3and RuO4species. The calculation results on the Ba-Sr-Ti-Ru-C-H-O system also present optimal feed composition and process conditions that result in high-quality (Ba, Sr)TiO3film.

AB - We have performed calculations to evaluate the thermodynamic stability of RuO2film and its effect on (Ba, Sr)TiO3(BST) film quality when it is deposited on RuO2thin film by metallorganic chemical vapor deposition. RuO2is rather stable when it is annealed in oxygen ambient. However, it was etched by gaseous oxygen when too much oxygen was fed at high temperatures. The degradation of RuO2occurs in two different reaction pathways depending on process conditions. One is the thermal decomposition of RuO2that mainly happens when no excess O2is present in the feed at low pressures. The other is the etching of RuO2film by excess O2, which produces gaseous RuO3and RuO4species. The calculation results on the Ba-Sr-Ti-Ru-C-H-O system also present optimal feed composition and process conditions that result in high-quality (Ba, Sr)TiO3film.

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DO - 10.1149/1.1355689

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JF - Journal of the Electrochemical Society

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ER -

Thermodynamic Stability of RuO₂Bottom Electrodes and Their Effect on the Ba-Sr-Ti Oxide Film Quality

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