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Thermal conductivity of yttria-stabilized zirconia thin films grown by plasma-enhanced atomic layer deposition

  • Sung Il Park
  • , Byung Chan Yang
  • , Jihyun Kim
  • , Jaeyoon Ko
  • , Gyung Min Choi
  • , Jihwan An
  • , Jungwan Cho
  • Sungkyunkwan University
  • Seoul National University of Science and Technology (SNUST)
  • Pohang University of Science and Technology

Research output: Contribution to journal › Article › peer-review

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