@inproceedings{7cdfeeb4446c415580c4bca6c6bbdb78,
title = "The properties of n-μc-SiO:H inter-layers for thin-film silicon tandem solar cells",
abstract = "The n-type hydrogenated microcrystalline silicon-incorporated silicon oxide (n-μc-SiO:H) films are prepared by 13.56MHz plasma enhanced chemical vapor deposition (rf-PECVD) using SiH 4, H 2 and CO 2 gases for an inter-layer between the amorphous silicon (a-Si:H) top-cell and the microcrystalline silicon (μc-Si:H) bottom-cell in the thin-film silicon tandem solar cells. The optical and electrical properties of n-μc-SiO:H prepared by varying deposition conditions are investigated. The refractive indices of the films are 2.1-2.7 at the wavelength of 600nm and the electrical conductivity is ∼ 5x10 -3 S/cm. Compared to ZnO:Al inter-layer, the n-μc-SiO:H provides reduced current loss of μc-Si:H bottom-cells as well as enhanced current gain of a-Si:H top-cell which might be due to the reduced absorption of incident light in the n-μc-SiO:H inter-layer. An analysis on tunnel recombination junction using current-voltage measurements shows the non-ohmic behavior when crystalline volume fraction and conductivity of inter-layer are low, resulting in the reduction of the FF and V oc in solar cells. The initial conversion efficiency of 10.66\% is achieved in thin film silicon tandem solar cells with n-μc-SiO:H inter-layer.",
author = "Chung, \{Jin Won\} and Ji, \{Eun Lee\} and Ji, \{Hoon Jang\} and Jeong, \{Chul Lee\} and Cho, \{Jun Sik\} and Young, \{Kuk Kim\} and Junsin Yi and O, \{Ok Park\} and Jinsoo Song and Kyung, \{Hoon Yoon\}",
year = "2009",
doi = "10.1109/PVSC.2009.5411174",
language = "English",
isbn = "9781424429509",
series = "Conference Record of the IEEE Photovoltaic Specialists Conference",
pages = "759--762",
booktitle = "2009 34th IEEE Photovoltaic Specialists Conference, PVSC 2009",
note = "2009 34th IEEE Photovoltaic Specialists Conference, PVSC 2009 ; Conference date: 07-06-2009 Through 12-06-2009",
}