The proceedings of the 2nd International Conference on Microelectronics and Plasma Technology - ICMAP 2009

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@article{3195c225d0b14538938534d239c026da,

title = "The proceedings of the 2nd International Conference on Microelectronics and Plasma Technology - ICMAP 2009",

author = "Lee, \{N. E.\}",

year = "2010",

month = sep,

day = "1",

doi = "10.1016/j.tsf.2010.06.048",

language = "English",

volume = "518",

pages = "6143--6144",

journal = "Thin Solid Films",

issn = "0040-6090",

publisher = "Elsevier B.V.",

number = "22",

}

TY - JOUR

T1 - The proceedings of the 2nd International Conference on Microelectronics and Plasma Technology - ICMAP 2009

AU - Lee, N. E.

PY - 2010/9/1

Y1 - 2010/9/1

UR - https://www.scopus.com/pages/publications/77956058728

U2 - 10.1016/j.tsf.2010.06.048

DO - 10.1016/j.tsf.2010.06.048

M3 - Editorial

AN - SCOPUS:77956058728

SN - 0040-6090

VL - 518

SP - 6143

EP - 6144

JO - Thin Solid Films

JF - Thin Solid Films

IS - 22

ER -