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The Preparation and Properties of Volatile Tris(N-Alkoxycarboxamidato)chromium(III) Complexes as Potential Single-Source Precursors for the MOCVD of Crystalline Chromium Oxide Thin Films

  • Ji Hun Kim
  • , Da Som Song
  • , Sunyoung Shin
  • , Ji Yeon Ryu
  • , Duk Young Jung
  • , Jongsun Lim
  • , Chang Gyoun Kim
  • Korea Research Institute of Chemical Technology
  • Sungkyunkwan University

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