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The effects of CF4 plasma treatment on the performance, gate bias stability, and defect characteristics of low-temperature indium-gallium-tin-oxide thin-film transistors

  • Dongbhin Kim
  • , Kyeong Bae Lee
  • , Junho Noh
  • , Donghyun Kim
  • , Hyunsoo Park
  • , Byoungdeog Choi
  • Sungkyunkwan University

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