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The effect of H2, N2 and N2O doping on DLC thin films deposited by a PECVD method

  • Y. T. Kim
  • , S. G. Yoon
  • , S. J. Suh
  • , J. H. Lee
  • , G. E. Jang
  • , D. H. Yoon
  • Sungkyunkwan University
  • Korea Institute of Industrial Technology
  • Chungbuk National University

Research output: Contribution to journal › Article › peer-review

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