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The distribution of Cu and resultant resistivity change in sputter deposited Al-Cu film as a conductive layer

  • D. H. Lee
  • , D. M. Jeon
  • , S. Y. Yoon
  • , J. P. Lee
  • , B. G. Kim
  • , S. J. Suh
  • Sungkyunkwan University

Research output: Contribution to journal › Conference article › peer-review

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