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The dielectric characteristics and thermal stability of Hf-silicate films with different Si contents

  • Dongwon Lee
  • , Dongchan Suh
  • , Yeonho Pae
  • , Hyoungsub Kim
  • , Mann Ho Cho
  • , Dae Hong Ko
  • Yonsei University

Research output: Contribution to journalArticlepeer-review

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