Tensile failure by grain thinning in micromachined aluminum thin films

Hoo Jeong Lee; Ping Zhang; John C. Bravman

doi:10.1063/1.1532933

Tensile failure by grain thinning in micromachined aluminum thin films

Hoo Jeong Lee
, Ping Zhang
, John C. Bravman

Research output: Contribution to journal › Article › peer-review

47 Scopus citations

Abstract

The tensile failure in micromachined aluminium thin films by grain thinning was investigated. The microtensile tests showed that the mechanical characteristics of the free-standing beams were different from those of the bulk material. It was found that the strain softening and low ductility prevail in free-standing thin films because of the absence of neighboring grains in the thickness direction.

Original language	English
Pages (from-to)	1443-1451
Number of pages	9
Journal	Journal of Applied Physics
Volume	93
Issue number	3
DOIs	https://doi.org/10.1063/1.1532933
State	Published - 1 Feb 2003
Externally published	Yes

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title = "Tensile failure by grain thinning in micromachined aluminum thin films",

abstract = "The tensile failure in micromachined aluminium thin films by grain thinning was investigated. The microtensile tests showed that the mechanical characteristics of the free-standing beams were different from those of the bulk material. It was found that the strain softening and low ductility prevail in free-standing thin films because of the absence of neighboring grains in the thickness direction.",

author = "Lee, \{Hoo Jeong\} and Ping Zhang and Bravman, \{John C.\}",

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doi = "10.1063/1.1532933",

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T1 - Tensile failure by grain thinning in micromachined aluminum thin films

AU - Lee, Hoo Jeong

AU - Zhang, Ping

AU - Bravman, John C.

PY - 2003/2/1

Y1 - 2003/2/1

N2 - The tensile failure in micromachined aluminium thin films by grain thinning was investigated. The microtensile tests showed that the mechanical characteristics of the free-standing beams were different from those of the bulk material. It was found that the strain softening and low ductility prevail in free-standing thin films because of the absence of neighboring grains in the thickness direction.

AB - The tensile failure in micromachined aluminium thin films by grain thinning was investigated. The microtensile tests showed that the mechanical characteristics of the free-standing beams were different from those of the bulk material. It was found that the strain softening and low ductility prevail in free-standing thin films because of the absence of neighboring grains in the thickness direction.

UR - https://www.scopus.com/pages/publications/0037323307

U2 - 10.1063/1.1532933

DO - 10.1063/1.1532933

M3 - Article

AN - SCOPUS:0037323307

SN - 0021-8979

VL - 93

SP - 1443

EP - 1451

JO - Journal of Applied Physics

JF - Journal of Applied Physics

IS - 3

ER -

Tensile failure by grain thinning in micromachined aluminum thin films

Abstract

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