Synthesis of New Heteroleptic Indium Complexes as Potential Precursors for Indium Oxide Thin Films

Dagyum Yoo; Seong Ho Han; Sung Kwang Lee; Taeyong Eom; Bo Keun Park; Chang Gyoun Kim; Seung Uk Son; Taek Mo Chung

doi:10.1002/ejic.202100276

Synthesis of New Heteroleptic Indium Complexes as Potential Precursors for Indium Oxide Thin Films

Dagyum Yoo, Seong Ho Han, Sung Kwang Lee, Taeyong Eom, Bo Keun Park, Chang Gyoun Kim, Seung Uk Son, Taek Mo Chung

Department of Chemistry

Research output: Contribution to journal › Article › peer-review

6 Scopus citations

Abstract

New heteroleptic indium complexes, i. e., [MeIn(mdpa)(tmhd)]₂ (2), [MeIn(mdpa)(acac)]₂ (3), [MeIn(edpa)(tmhd)]₂ (4), and [MeIn(edpa)(acac)]₂ (5), with three different ligands, bearing N-alkoxy carboxamide and β-diketonate were designed and synthesized as indium precursors for indium oxide thin films by atomic layer deposition (ALD) using [Me₂In(edpa)]₂ and [Me₂In(mdpa)]₂ (1) as starting materials. The resulting complexes were characterized by NMR and FT-IR spectroscopy, elemental analysis (EA), thermogravimetric analysis (TGA), and single crystal X-ray diffraction. TGA curves of all the complexes showed clear single-step weight losses, with low residual masses of 7–13 %. Among them, complex 5 was volatile and thermally stable, and thus, it can be used as potential indium precursor for indium oxide-based thin films.

Original language	English
Pages (from-to)	2480-2485
Number of pages	6
Journal	European Journal of Inorganic Chemistry
Volume	2021
Issue number	25
DOIs	https://doi.org/10.1002/ejic.202100276
State	Published - 7 Jul 2021

Keywords

Chelates
Indium
Precursors
Thin films

Access to Document

10.1002/ejic.202100276

Cite this

@article{2ce83508bd0349d38c240f5226f58c72,

title = "Synthesis of New Heteroleptic Indium Complexes as Potential Precursors for Indium Oxide Thin Films",

abstract = "New heteroleptic indium complexes, i. e., [MeIn(mdpa)(tmhd)]2 (2), [MeIn(mdpa)(acac)]2 (3), [MeIn(edpa)(tmhd)]2 (4), and [MeIn(edpa)(acac)]2 (5), with three different ligands, bearing N-alkoxy carboxamide and β-diketonate were designed and synthesized as indium precursors for indium oxide thin films by atomic layer deposition (ALD) using [Me2In(edpa)]2 and [Me2In(mdpa)]2 (1) as starting materials. The resulting complexes were characterized by NMR and FT-IR spectroscopy, elemental analysis (EA), thermogravimetric analysis (TGA), and single crystal X-ray diffraction. TGA curves of all the complexes showed clear single-step weight losses, with low residual masses of 7–13 \%. Among them, complex 5 was volatile and thermally stable, and thus, it can be used as potential indium precursor for indium oxide-based thin films.",

keywords = "Chelates, Indium, Precursors, Thin films",

author = "Dagyum Yoo and Han, \{Seong Ho\} and Lee, \{Sung Kwang\} and Taeyong Eom and Park, \{Bo Keun\} and Kim, \{Chang Gyoun\} and Son, \{Seung Uk\} and Chung, \{Taek Mo\}",

note = "Publisher Copyright: {\textcopyright} 2021 Wiley-VCH GmbH.",

year = "2021",

month = jul,

day = "7",

doi = "10.1002/ejic.202100276",

language = "English",

volume = "2021",

pages = "2480--2485",

journal = "European Journal of Inorganic Chemistry",

issn = "1434-1948",

publisher = "Wiley-VCH Verlag",

number = "25",

}

TY - JOUR

T1 - Synthesis of New Heteroleptic Indium Complexes as Potential Precursors for Indium Oxide Thin Films

AU - Yoo, Dagyum

AU - Han, Seong Ho

AU - Lee, Sung Kwang

AU - Eom, Taeyong

AU - Park, Bo Keun

AU - Kim, Chang Gyoun

AU - Son, Seung Uk

AU - Chung, Taek Mo

PY - 2021/7/7

Y1 - 2021/7/7

N2 - New heteroleptic indium complexes, i. e., [MeIn(mdpa)(tmhd)]2 (2), [MeIn(mdpa)(acac)]2 (3), [MeIn(edpa)(tmhd)]2 (4), and [MeIn(edpa)(acac)]2 (5), with three different ligands, bearing N-alkoxy carboxamide and β-diketonate were designed and synthesized as indium precursors for indium oxide thin films by atomic layer deposition (ALD) using [Me2In(edpa)]2 and [Me2In(mdpa)]2 (1) as starting materials. The resulting complexes were characterized by NMR and FT-IR spectroscopy, elemental analysis (EA), thermogravimetric analysis (TGA), and single crystal X-ray diffraction. TGA curves of all the complexes showed clear single-step weight losses, with low residual masses of 7–13 %. Among them, complex 5 was volatile and thermally stable, and thus, it can be used as potential indium precursor for indium oxide-based thin films.

AB - New heteroleptic indium complexes, i. e., [MeIn(mdpa)(tmhd)]2 (2), [MeIn(mdpa)(acac)]2 (3), [MeIn(edpa)(tmhd)]2 (4), and [MeIn(edpa)(acac)]2 (5), with three different ligands, bearing N-alkoxy carboxamide and β-diketonate were designed and synthesized as indium precursors for indium oxide thin films by atomic layer deposition (ALD) using [Me2In(edpa)]2 and [Me2In(mdpa)]2 (1) as starting materials. The resulting complexes were characterized by NMR and FT-IR spectroscopy, elemental analysis (EA), thermogravimetric analysis (TGA), and single crystal X-ray diffraction. TGA curves of all the complexes showed clear single-step weight losses, with low residual masses of 7–13 %. Among them, complex 5 was volatile and thermally stable, and thus, it can be used as potential indium precursor for indium oxide-based thin films.

KW - Chelates

KW - Indium

KW - Precursors

KW - Thin films

UR - https://www.scopus.com/pages/publications/85107914287

U2 - 10.1002/ejic.202100276

DO - 10.1002/ejic.202100276

M3 - Article

AN - SCOPUS:85107914287

SN - 1434-1948

VL - 2021

SP - 2480

EP - 2485

JO - European Journal of Inorganic Chemistry

JF - European Journal of Inorganic Chemistry

IS - 25

ER -

Synthesis of New Heteroleptic Indium Complexes as Potential Precursors for Indium Oxide Thin Films

Abstract

Keywords

Access to Document

Other files and links

Fingerprint

Cite this