Synthesis of metal-oxide nanotubular structures by using atomic layer deposition on nanotemplates

Nanotube fabrication processes through modification of conventional nanotemplate methods are investigated. In order to fabricate the nanotubes by using nanotemplates, we treated surface-modification self-assembled monolayers on the nanotemplates in order to achieve selective deposition. We used commercially available polycarbonate nanotemplates, supplying uniform nano-scale pores and selective removal of the templates. We deposited conformal and uniform thin tube walls by using atomic layer deposition for oxide layers such as titania and zirconia. The wall thickness was precisely controlled by the number of deposition cycles of the ALD process. The shapes of nanotubes were controlled by template pore sizes and thicknesses. The various properties of the resultant metal-oxide nanotube were examined using by high-resolution transmission electron microscopye, field-emission scanning electron microscopye and a selective area electron-diffraction pattern.