Synthesis and characterization of diamond-like carbon protective AR coating

Won Seok Choi; Byungyou Hong; Youngsook Jeon; Kyunghae Kim; Junsin Yi

Synthesis and characterization of diamond-like carbon protective AR coating

Won Seok Choi
, Byungyou Hong
, Youngsook Jeon
, Kyunghae Kim
, Junsin Yi

Department of Electronic and Electrical Engineering

Sungkyunkwan University

Research output: Contribution to journal › Article › peer-review

10 Scopus citations

Abstract

Diamond-like carbon (DLC) films were prepared by a RF-PECVD (Plasma Enhanced Chemical Vapor Deposition) method on glass and silicon substrates by using methane (CH ₄) and hydrogen (H ₂) gas. We investigated the effect of CH ₄ to H ₂ ratios on optical and mechanical properties of the DLC films. The structure and surface morphology of the films were examined by using Raman spectroscopy and Atomic Force Microscopy (AFM). The optical properties of DLC thin film were investigated by UV-visible spectrometry and ellipsometry.

Original language	English
Pages (from-to)	S864-S867
Journal	Journal of the Korean Physical Society
Volume	45
Issue number	SUPPL.
State	Published - Dec 2004

Keywords

Antireflection coatings
Carbon film
Diamond-like
Plasma Enhanced Chemical Vapor Deposition

Cite this

@article{a466dacd38f347d5b99b80cddd387415,

title = "Synthesis and characterization of diamond-like carbon protective AR coating",

abstract = "Diamond-like carbon (DLC) films were prepared by a RF-PECVD (Plasma Enhanced Chemical Vapor Deposition) method on glass and silicon substrates by using methane (CH 4) and hydrogen (H 2) gas. We investigated the effect of CH 4 to H 2 ratios on optical and mechanical properties of the DLC films. The structure and surface morphology of the films were examined by using Raman spectroscopy and Atomic Force Microscopy (AFM). The optical properties of DLC thin film were investigated by UV-visible spectrometry and ellipsometry.",

keywords = "Antireflection coatings, Carbon film, Diamond-like, Plasma Enhanced Chemical Vapor Deposition",

author = "Choi, \{Won Seok\} and Byungyou Hong and Youngsook Jeon and Kyunghae Kim and Junsin Yi",

year = "2004",

month = dec,

language = "English",

volume = "45",

pages = "S864--S867",

journal = "Journal of the Korean Physical Society",

issn = "0374-4884",

publisher = "Korean Physical Society",

number = "SUPPL.",

}

TY - JOUR

T1 - Synthesis and characterization of diamond-like carbon protective AR coating

AU - Choi, Won Seok

AU - Hong, Byungyou

AU - Jeon, Youngsook

AU - Kim, Kyunghae

AU - Yi, Junsin

PY - 2004/12

Y1 - 2004/12

N2 - Diamond-like carbon (DLC) films were prepared by a RF-PECVD (Plasma Enhanced Chemical Vapor Deposition) method on glass and silicon substrates by using methane (CH 4) and hydrogen (H 2) gas. We investigated the effect of CH 4 to H 2 ratios on optical and mechanical properties of the DLC films. The structure and surface morphology of the films were examined by using Raman spectroscopy and Atomic Force Microscopy (AFM). The optical properties of DLC thin film were investigated by UV-visible spectrometry and ellipsometry.

AB - Diamond-like carbon (DLC) films were prepared by a RF-PECVD (Plasma Enhanced Chemical Vapor Deposition) method on glass and silicon substrates by using methane (CH 4) and hydrogen (H 2) gas. We investigated the effect of CH 4 to H 2 ratios on optical and mechanical properties of the DLC films. The structure and surface morphology of the films were examined by using Raman spectroscopy and Atomic Force Microscopy (AFM). The optical properties of DLC thin film were investigated by UV-visible spectrometry and ellipsometry.

KW - Antireflection coatings

KW - Carbon film

KW - Diamond-like

KW - Plasma Enhanced Chemical Vapor Deposition

UR - https://www.scopus.com/pages/publications/12744277353

M3 - Article

AN - SCOPUS:12744277353

SN - 0374-4884

VL - 45

SP - S864-S867

JO - Journal of the Korean Physical Society

JF - Journal of the Korean Physical Society

IS - SUPPL.

ER -

Synthesis and characterization of diamond-like carbon protective AR coating

Abstract

Keywords

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