Synthesis and characterization of a novel zinc precursor for atomic layer deposition of ZnO thin films

Ji Min Seo; Heesun Kim; Yongmin Go; Seung Uk Son; Ji Yeon Ryu; Taek Mo Chung; Bo Keun Park

doi:10.1080/15421406.2025.2494302

Synthesis and characterization of a novel zinc precursor for atomic layer deposition of ZnO thin films

Ji Min Seo, Heesun Kim, Yongmin Go, Seung Uk Son, Ji Yeon Ryu, Taek Mo Chung, Bo Keun Park

Department of Chemistry

Research output: Contribution to journal › Article › peer-review

Abstract

The [Zn(dmadmb)₂]₂ (1) complex was synthesized through a reaction between ZnCl₂ and sodium (Z)-1-(dimethylamino)-3,3-dimethylbut-1-en-2-olate (Na(dmadmb)), which was isolated purely by sublimation and recrystallization. Characterization using NMR, FT-IR, elemental analysis, and single-crystal X-ray diffraction revealed a dimeric structure with a distorted trigonal bipyramidal geometry for complex 1. Thermogravimetric analysis showed a single-step weight loss without intermediate decomposition.

Original language	English
Pages (from-to)	556-563
Number of pages	8
Journal	Molecular Crystals and Liquid Crystals
Volume	769
Issue number	5
DOIs	https://doi.org/10.1080/15421406.2025.2494302
State	Published - 2025

Keywords

Aminoketone ligand
atomic layer deposition
zinc precursor
ZnO thin films

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10.1080/15421406.2025.2494302

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title = "Synthesis and characterization of a novel zinc precursor for atomic layer deposition of ZnO thin films",

abstract = "The [Zn(dmadmb)2]2 (1) complex was synthesized through a reaction between ZnCl2 and sodium (Z)-1-(dimethylamino)-3,3-dimethylbut-1-en-2-olate (Na(dmadmb)), which was isolated purely by sublimation and recrystallization. Characterization using NMR, FT-IR, elemental analysis, and single-crystal X-ray diffraction revealed a dimeric structure with a distorted trigonal bipyramidal geometry for complex 1. Thermogravimetric analysis showed a single-step weight loss without intermediate decomposition.",

keywords = "Aminoketone ligand, atomic layer deposition, zinc precursor, ZnO thin films",

author = "Seo, \{Ji Min\} and Heesun Kim and Yongmin Go and Son, \{Seung Uk\} and Ryu, \{Ji Yeon\} and Chung, \{Taek Mo\} and Park, \{Bo Keun\}",

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year = "2025",

doi = "10.1080/15421406.2025.2494302",

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T1 - Synthesis and characterization of a novel zinc precursor for atomic layer deposition of ZnO thin films

AU - Seo, Ji Min

AU - Kim, Heesun

AU - Go, Yongmin

AU - Son, Seung Uk

AU - Ryu, Ji Yeon

AU - Chung, Taek Mo

AU - Park, Bo Keun

PY - 2025

Y1 - 2025

N2 - The [Zn(dmadmb)2]2 (1) complex was synthesized through a reaction between ZnCl2 and sodium (Z)-1-(dimethylamino)-3,3-dimethylbut-1-en-2-olate (Na(dmadmb)), which was isolated purely by sublimation and recrystallization. Characterization using NMR, FT-IR, elemental analysis, and single-crystal X-ray diffraction revealed a dimeric structure with a distorted trigonal bipyramidal geometry for complex 1. Thermogravimetric analysis showed a single-step weight loss without intermediate decomposition.

AB - The [Zn(dmadmb)2]2 (1) complex was synthesized through a reaction between ZnCl2 and sodium (Z)-1-(dimethylamino)-3,3-dimethylbut-1-en-2-olate (Na(dmadmb)), which was isolated purely by sublimation and recrystallization. Characterization using NMR, FT-IR, elemental analysis, and single-crystal X-ray diffraction revealed a dimeric structure with a distorted trigonal bipyramidal geometry for complex 1. Thermogravimetric analysis showed a single-step weight loss without intermediate decomposition.

KW - Aminoketone ligand

KW - atomic layer deposition

KW - zinc precursor

KW - ZnO thin films

UR - https://www.scopus.com/pages/publications/105003888613

U2 - 10.1080/15421406.2025.2494302

DO - 10.1080/15421406.2025.2494302

M3 - Article

AN - SCOPUS:105003888613

SN - 1542-1406

VL - 769

SP - 556

EP - 563

JO - Molecular Crystals and Liquid Crystals

JF - Molecular Crystals and Liquid Crystals

IS - 5

ER -

Synthesis and characterization of a novel zinc precursor for atomic layer deposition of ZnO thin films

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