Synthesis and characterization of a novel zinc precursor for atomic layer deposition of ZnO thin films

Ji Min Seo; Heesun Kim; Yongmin Go; Seung Uk Son; Ji Yeon Ryu; Taek Mo Chung; Bo Keun Park

doi:10.1080/15421406.2025.2494302

Synthesis and characterization of a novel zinc precursor for atomic layer deposition of ZnO thin films

Ji Min Seo
, Heesun Kim
, Yongmin Go
, Seung Uk Son
, Ji Yeon Ryu
, Taek Mo Chung
, Bo Keun Park

Department of Chemistry

Korea Research Institute of Chemical Technology
Sungkyunkwan University
University of Science and Technology UST

Research output: Contribution to journal › Article › peer-review

Abstract

The [Zn(dmadmb)₂]₂ (1) complex was synthesized through a reaction between ZnCl₂ and sodium (Z)-1-(dimethylamino)-3,3-dimethylbut-1-en-2-olate (Na(dmadmb)), which was isolated purely by sublimation and recrystallization. Characterization using NMR, FT-IR, elemental analysis, and single-crystal X-ray diffraction revealed a dimeric structure with a distorted trigonal bipyramidal geometry for complex 1. Thermogravimetric analysis showed a single-step weight loss without intermediate decomposition.

Original language	English
Pages (from-to)	556-563
Number of pages	8
Journal	Molecular Crystals and Liquid Crystals
Volume	769
Issue number	5
DOIs	https://doi.org/10.1080/15421406.2025.2494302
State	Published - 2025

Keywords

Aminoketone ligand
atomic layer deposition
zinc precursor
ZnO thin films

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10.1080/15421406.2025.2494302

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title = "Synthesis and characterization of a novel zinc precursor for atomic layer deposition of ZnO thin films",

abstract = "The [Zn(dmadmb)2]2 (1) complex was synthesized through a reaction between ZnCl2 and sodium (Z)-1-(dimethylamino)-3,3-dimethylbut-1-en-2-olate (Na(dmadmb)), which was isolated purely by sublimation and recrystallization. Characterization using NMR, FT-IR, elemental analysis, and single-crystal X-ray diffraction revealed a dimeric structure with a distorted trigonal bipyramidal geometry for complex 1. Thermogravimetric analysis showed a single-step weight loss without intermediate decomposition.",

keywords = "Aminoketone ligand, atomic layer deposition, zinc precursor, ZnO thin films",

author = "Seo, \{Ji Min\} and Heesun Kim and Yongmin Go and Son, \{Seung Uk\} and Ryu, \{Ji Yeon\} and Chung, \{Taek Mo\} and Park, \{Bo Keun\}",

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year = "2025",

doi = "10.1080/15421406.2025.2494302",

language = "English",

volume = "769",

pages = "556--563",

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T1 - Synthesis and characterization of a novel zinc precursor for atomic layer deposition of ZnO thin films

AU - Seo, Ji Min

AU - Kim, Heesun

AU - Go, Yongmin

AU - Son, Seung Uk

AU - Ryu, Ji Yeon

AU - Chung, Taek Mo

AU - Park, Bo Keun

PY - 2025

Y1 - 2025

N2 - The [Zn(dmadmb)2]2 (1) complex was synthesized through a reaction between ZnCl2 and sodium (Z)-1-(dimethylamino)-3,3-dimethylbut-1-en-2-olate (Na(dmadmb)), which was isolated purely by sublimation and recrystallization. Characterization using NMR, FT-IR, elemental analysis, and single-crystal X-ray diffraction revealed a dimeric structure with a distorted trigonal bipyramidal geometry for complex 1. Thermogravimetric analysis showed a single-step weight loss without intermediate decomposition.

AB - The [Zn(dmadmb)2]2 (1) complex was synthesized through a reaction between ZnCl2 and sodium (Z)-1-(dimethylamino)-3,3-dimethylbut-1-en-2-olate (Na(dmadmb)), which was isolated purely by sublimation and recrystallization. Characterization using NMR, FT-IR, elemental analysis, and single-crystal X-ray diffraction revealed a dimeric structure with a distorted trigonal bipyramidal geometry for complex 1. Thermogravimetric analysis showed a single-step weight loss without intermediate decomposition.

KW - Aminoketone ligand

KW - atomic layer deposition

KW - zinc precursor

KW - ZnO thin films

UR - https://www.scopus.com/pages/publications/105003888613

U2 - 10.1080/15421406.2025.2494302

DO - 10.1080/15421406.2025.2494302

M3 - Article

AN - SCOPUS:105003888613

SN - 1542-1406

VL - 769

SP - 556

EP - 563

JO - Molecular Crystals and Liquid Crystals

JF - Molecular Crystals and Liquid Crystals

IS - 5

ER -

Synthesis and characterization of a novel zinc precursor for atomic layer deposition of ZnO thin films

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