Abstract
The roughness factor of barrier-type anodic oxide layer with low electrical conductivity was evaluated using electrochemical measurement in electrolyte with redox couple. To evaluate the surface roughness factor, the surface of barrier-type oxide layer was covered with thin layer of platinum by sputtering. From the limiting diffusion current method the surface roughness factor of barrier-type Al2O3 estimated to be 1.03. This factor is in good agreement with the results of the cross-sectional characteristics by using transmission electron microscope.
| Original language | English |
|---|---|
| Pages (from-to) | 331-334 |
| Number of pages | 4 |
| Journal | Materials Chemistry and Physics |
| Volume | 82 |
| Issue number | 2 |
| DOIs | |
| State | Published - 15 Nov 2003 |
Keywords
- Aluminum oxide
- Capacitance
- Dielectric properties
- Electrochemical techniques
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