Surface properties of GaN fabricated by laser lift-off and ICP etching

In this report, we describe the surface properties of a controlled thickness GaN microcavity which incorporates Zr₂O₃/SiO₂ DBR stacks for both the bottom and the top mirrors. The GaN microcavities were fabricated using laser lift-off and inductively coupled plasma etching. We also compared etch rates, surface composition, and surface roughness between grown GaN and GaN fabricated by laser lift-off and ICP etching.