Surface decomposition mechanism of Ti(OC3H7)4 on a platinum surface

Sung Il Cho, Chan Hwa Chung, Sang Heup Moon

Research output: Contribution to journalConference articlepeer-review

13 Scopus citations

Abstract

The decomposition behavior of titanium tetraisopropoxide [TTIP; Ti(OC3H7)4] on a platinum surface has been studied using the thermal desorption technique. TTIP is dissociated on platinum below 230 K so that the platinum surface is covered with isopropoxy species and hydrogen originating from TTIP. The isopropoxy species adsorbed on the platinum surface are decomposed to acetone at 230 K. Two forms of surface hydrogen exist: molecular and atomic. Molecular hydrogen is desorbed at 230 K and atomic hydrogen is desorbed after recombination at 440 K. At higher dosages, TTIP is not completely dissociated, but some of isopropoxy ligands are still bound to titanium, even at 300 K. These intact ligands of TTIP produce acetone, isopropanol and propylene at temperatures between 300 and 500 K by disproportionation among themselves or by simple decomposition of the Ti-O bond in TTIP.

Original languageEnglish
Pages (from-to)98-104
Number of pages7
JournalThin Solid Films
Volume409
Issue number1
DOIs
StatePublished - 22 Apr 2002
EventProceedings of the 2nd Asian Conference on Chemical Vapour Dep - Gyeongje, Korea, Republic of
Duration: 28 May 200130 May 2001

Keywords

  • Platinum
  • Thermal desorption
  • Titanium tetraisopropoxide (TTIP)

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