Suppression of boron diffusion using carbon co-implantation in DRAM
- Suk Hun Lee
- , Se Geun Park
- , Shin Deuk Kim
- , Hyuck Chai Jung
- , Il Gweon Kim
- , Dong Ho Kang
- , Dae Jung Kim
- , Kyu Pil Lee
- , Joo Sun Choi
- , Jung Woo Baek
- , Moonsuk Choi
- , Yongkook Park
- , Changhwan Choi
- , Jin Hong Park
- Sungkyunkwan University
- Samsung
- Chosun University
- Hanyang University
Research output: Contribution to journal › Article › peer-review
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