Superconducting YBa2Cu3O7-xthin films prepared by DC plasma chemical vapour deposition

W. N. Kang; Y. S. Yoon; S. S. Yom

doi:10.1088/0953-2048/7/6/001

Superconducting YBa₂Cu₃O_7-xthin films prepared by DC plasma chemical vapour deposition

W. N. Kang, Y. S. Yoon, S. S. Yom

Department of Physics

Research output: Contribution to journal › Article › peer-review

6 Scopus citations

Abstract

YBa₂Cu₃O_7-xsuperconducting thin films were grown on polycrystalline yttria-stabilized zirconia (p-YSZ) and single-crystalline SrTiO₃infstrates by DC plasma-assisted metallorganic chemical vapour deposition. A DC plasma was generated in the reaction chamber by applying a DC potential of 200 V at a plasma current of 2 mA. The as-deposited films on an SrTiO₃infstrate at a temperature of 730 degrees C show a sharp resistive transition of T_c,zero=88 K. We show that DC plasma-assisted metallorganic chemical vapour deposition is useful to obtain YBa₂Cu₃O_7-xthin films with the c axis normal to the p-YSZ and SrTiO₃infstrates.

Original language	English
Pages (from-to)	333-336
Number of pages	4
Journal	Superconductor Science and Technology
Volume	7
Issue number	6
DOIs	https://doi.org/10.1088/0953-2048/7/6/001
State	Published - Jun 1994

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title = "Superconducting YBa2Cu3O7-xthin films prepared by DC plasma chemical vapour deposition",

abstract = "YBa2Cu3O7-xsuperconducting thin films were grown on polycrystalline yttria-stabilized zirconia (p-YSZ) and single-crystalline SrTiO3infstrates by DC plasma-assisted metallorganic chemical vapour deposition. A DC plasma was generated in the reaction chamber by applying a DC potential of 200 V at a plasma current of 2 mA. The as-deposited films on an SrTiO3infstrate at a temperature of 730 degrees C show a sharp resistive transition of Tc,zero=88 K. We show that DC plasma-assisted metallorganic chemical vapour deposition is useful to obtain YBa2Cu3O7-xthin films with the c axis normal to the p-YSZ and SrTiO3infstrates.",

author = "Kang, \{W. N.\} and Yoon, \{Y. S.\} and Yom, \{S. S.\}",

year = "1994",

month = jun,

doi = "10.1088/0953-2048/7/6/001",

language = "English",

volume = "7",

pages = "333--336",

journal = "Superconductor Science and Technology",

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T1 - Superconducting YBa2Cu3O7-xthin films prepared by DC plasma chemical vapour deposition

AU - Kang, W. N.

AU - Yoon, Y. S.

AU - Yom, S. S.

PY - 1994/6

Y1 - 1994/6

N2 - YBa2Cu3O7-xsuperconducting thin films were grown on polycrystalline yttria-stabilized zirconia (p-YSZ) and single-crystalline SrTiO3infstrates by DC plasma-assisted metallorganic chemical vapour deposition. A DC plasma was generated in the reaction chamber by applying a DC potential of 200 V at a plasma current of 2 mA. The as-deposited films on an SrTiO3infstrate at a temperature of 730 degrees C show a sharp resistive transition of Tc,zero=88 K. We show that DC plasma-assisted metallorganic chemical vapour deposition is useful to obtain YBa2Cu3O7-xthin films with the c axis normal to the p-YSZ and SrTiO3infstrates.

AB - YBa2Cu3O7-xsuperconducting thin films were grown on polycrystalline yttria-stabilized zirconia (p-YSZ) and single-crystalline SrTiO3infstrates by DC plasma-assisted metallorganic chemical vapour deposition. A DC plasma was generated in the reaction chamber by applying a DC potential of 200 V at a plasma current of 2 mA. The as-deposited films on an SrTiO3infstrate at a temperature of 730 degrees C show a sharp resistive transition of Tc,zero=88 K. We show that DC plasma-assisted metallorganic chemical vapour deposition is useful to obtain YBa2Cu3O7-xthin films with the c axis normal to the p-YSZ and SrTiO3infstrates.

UR - https://www.scopus.com/pages/publications/0028446954

U2 - 10.1088/0953-2048/7/6/001

DO - 10.1088/0953-2048/7/6/001

M3 - Article

AN - SCOPUS:0028446954

SN - 0953-2048

VL - 7

SP - 333

EP - 336

JO - Superconductor Science and Technology

JF - Superconductor Science and Technology

IS - 6

ER -

Superconducting YBa₂Cu₃O_7-xthin films prepared by DC plasma chemical vapour deposition

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