Substrate temperature effect on the growth of carbon nanowalls synthesized via microwave PECVD

Sung Yun Kim; Won Seok Choi; Jae Hyeoung Lee; Byungyou Hong

doi:10.1016/j.materresbull.2014.07.001

Substrate temperature effect on the growth of carbon nanowalls synthesized via microwave PECVD

Sung Yun Kim
, Won Seok Choi
, Jae Hyeoung Lee
, Byungyou Hong

Department of Electronic and Electrical Engineering

Research output: Contribution to journal › Article › peer-review

25 Scopus citations

Abstract

A carbon nanowall (CNW) is a carbon-based nanomaterial that is constructed with vertical-structure graphenes. Thus, it effectively increases the reaction surface of electrodes. In this study, the substrate temperature effect on the growth of CNWs was investigated via microwave plasma enhanced chemical vapor deposition (PECVD) with methane (CH₄) and hydrogen (H₂) gases on silicon substrates. To find the growth mechanism of a CNW, its growth temperature was changed from 700 °C to 950°C. The vertical and surface conditions of the grown CNWs according to the growth temperature were characterized via field emission scanning electron microscopy (FE-SEM). The energy-dispersive spectroscopy (EDS) measurements showed that the CNWs were composed solely of carbon.

Original language	English
Pages (from-to)	112-116
Number of pages	5
Journal	Materials Research Bulletin
Volume	58
DOIs	https://doi.org/10.1016/j.materresbull.2014.07.001
State	Published - Oct 2014

Keywords

A. Nanostructures
B. Plasma deposition
C. Electron microscopy

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10.1016/j.materresbull.2014.07.001

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title = "Substrate temperature effect on the growth of carbon nanowalls synthesized via microwave PECVD",

abstract = "A carbon nanowall (CNW) is a carbon-based nanomaterial that is constructed with vertical-structure graphenes. Thus, it effectively increases the reaction surface of electrodes. In this study, the substrate temperature effect on the growth of CNWs was investigated via microwave plasma enhanced chemical vapor deposition (PECVD) with methane (CH4) and hydrogen (H2) gases on silicon substrates. To find the growth mechanism of a CNW, its growth temperature was changed from 700 °C to 950°C. The vertical and surface conditions of the grown CNWs according to the growth temperature were characterized via field emission scanning electron microscopy (FE-SEM). The energy-dispersive spectroscopy (EDS) measurements showed that the CNWs were composed solely of carbon.",

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AU - Kim, Sung Yun

AU - Choi, Won Seok

AU - Lee, Jae Hyeoung

AU - Hong, Byungyou

PY - 2014/10

Y1 - 2014/10

N2 - A carbon nanowall (CNW) is a carbon-based nanomaterial that is constructed with vertical-structure graphenes. Thus, it effectively increases the reaction surface of electrodes. In this study, the substrate temperature effect on the growth of CNWs was investigated via microwave plasma enhanced chemical vapor deposition (PECVD) with methane (CH4) and hydrogen (H2) gases on silicon substrates. To find the growth mechanism of a CNW, its growth temperature was changed from 700 °C to 950°C. The vertical and surface conditions of the grown CNWs according to the growth temperature were characterized via field emission scanning electron microscopy (FE-SEM). The energy-dispersive spectroscopy (EDS) measurements showed that the CNWs were composed solely of carbon.

AB - A carbon nanowall (CNW) is a carbon-based nanomaterial that is constructed with vertical-structure graphenes. Thus, it effectively increases the reaction surface of electrodes. In this study, the substrate temperature effect on the growth of CNWs was investigated via microwave plasma enhanced chemical vapor deposition (PECVD) with methane (CH4) and hydrogen (H2) gases on silicon substrates. To find the growth mechanism of a CNW, its growth temperature was changed from 700 °C to 950°C. The vertical and surface conditions of the grown CNWs according to the growth temperature were characterized via field emission scanning electron microscopy (FE-SEM). The energy-dispersive spectroscopy (EDS) measurements showed that the CNWs were composed solely of carbon.

KW - A. Nanostructures

KW - B. Plasma deposition

KW - C. Electron microscopy

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DO - 10.1016/j.materresbull.2014.07.001

M3 - Article

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SN - 0025-5408

VL - 58

SP - 112

EP - 116

JO - Materials Research Bulletin

JF - Materials Research Bulletin

ER -

Substrate temperature effect on the growth of carbon nanowalls synthesized via microwave PECVD

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Keywords

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