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Sub-stoichiometric zirconium oxide as a solution-processed dielectric for reconfigurable electronics

  • Kangsan Kim
  • , Jihyun Kim
  • , Myeongjin Jung
  • , In Soo Kim
  • , Byoung Soo Yu
  • , Sang Min Won
  • , Donghee Son
  • , Heng Li
  • , Zdeněk Sofer
  • , Do Kyung Hwang
  • , Deep Jariwala
  • , Joohoon Kang
  • Sungkyunkwan University
  • Samsung
  • Yonsei University
  • University of Pennsylvania
  • Korea Institute of Science and Technology
  • University of Science and Technology UST
  • University of Chemistry and Technology, Prague
  • Korea University

Research output: Contribution to journalArticlepeer-review

Abstract

Reconfigurable devices that can switch functionalities could be used to overcome the limitations of miniaturized metal–oxide–semiconductor field-effect transistors. Conventional approaches typically involve the partial electrostatic modulation of two-dimensional semiconductors and use partial floating gates or dual-gate structures. Reconfigurable devices based on vertical van der Waals heterostructures have much simpler device structures, but lack a scalable assembly method. Here, we report a scalable reconfigurable device based on solution-processed van der Waals heterostructures. We vertically assemble thin films of sub-stoichiometric zirconium oxide (ZrO2-x) as a dielectric and molybdenum disulfide (MoS2) as a semiconductor layer. The ZrO2-x/MoS2 heterostructure provides simultaneous global and local gating within a single-gate transistor configuration, modulating the spatial electric field across the device in a reconfigurable manner. Under global gating conditions, the devices function as uniform field-effect transistors with an average field-effect mobility of 10 cm2 V−1 s−1 and current on/off ratio of up to 106. Under local gating conditions, the devices function as diodes, exhibiting a current rectification ratio of around 7 × 104. By harnessing the reconfigurable characteristics, we achieve adjustable temporal photoresponse dynamics with a photoresponsivity of around 105 A W−1, high spatial uniformity and multi-spectral photodetection. We also use the approach to create a large-area reconfigurable optoelectronics array.

Original languageEnglish
Pages (from-to)461-473
Number of pages13
JournalNature Electronics
Volume8
Issue number6
DOIs
StatePublished - Jun 2025

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