Study on the strength and elongation of free-standing Al beams for microelectromechanical systems applications

Hoo Jeong Lee; Ping Zhang; John C. Bravman

doi:10.1063/1.1646765

Study on the strength and elongation of free-standing Al beams for microelectromechanical systems applications

Hoo Jeong Lee, Ping Zhang, John C. Bravman

Research output: Contribution to journal › Article › peer-review

10 Scopus citations

Abstract

The yield strength and elongation of free-standing Al films were studied. A careful comparison between the effects of the thickness and the grain size suggests that if the grain size remains the same, the yield strength does not change with the thickness whereas the elongation varies with it very sensitively. Results imply that the size factor could be critical for the elongation but not for the yield strength.

Original language	English
Pages (from-to)	915-917
Number of pages	3
Journal	Applied Physics Letters
Volume	84
Issue number	6
DOIs	https://doi.org/10.1063/1.1646765
State	Published - 9 Feb 2004
Externally published	Yes

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10.1063/1.1646765

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title = "Study on the strength and elongation of free-standing Al beams for microelectromechanical systems applications",

abstract = "The yield strength and elongation of free-standing Al films were studied. A careful comparison between the effects of the thickness and the grain size suggests that if the grain size remains the same, the yield strength does not change with the thickness whereas the elongation varies with it very sensitively. Results imply that the size factor could be critical for the elongation but not for the yield strength.",

author = "Lee, \{Hoo Jeong\} and Ping Zhang and Bravman, \{John C.\}",

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AU - Zhang, Ping

AU - Bravman, John C.

PY - 2004/2/9

Y1 - 2004/2/9

N2 - The yield strength and elongation of free-standing Al films were studied. A careful comparison between the effects of the thickness and the grain size suggests that if the grain size remains the same, the yield strength does not change with the thickness whereas the elongation varies with it very sensitively. Results imply that the size factor could be critical for the elongation but not for the yield strength.

AB - The yield strength and elongation of free-standing Al films were studied. A careful comparison between the effects of the thickness and the grain size suggests that if the grain size remains the same, the yield strength does not change with the thickness whereas the elongation varies with it very sensitively. Results imply that the size factor could be critical for the elongation but not for the yield strength.

UR - https://www.scopus.com/pages/publications/1542345309

U2 - 10.1063/1.1646765

DO - 10.1063/1.1646765

M3 - Article

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JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 6

ER -

Study on the strength and elongation of free-standing Al beams for microelectromechanical systems applications

Abstract

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