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Study on hydrogen-based reactive ion etching of Ovonic threshold switch (OTS) materials for phase change memory devices

  • D. S. Kim
  • , Y. J. Gill
  • , Y. J. Jang
  • , Y. E. Kim
  • , G. Y. Yeom
  • Sungkyunkwan University

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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