Abstract
Bi modified YMnO 3 : (Y 0.95 ,Bi 0.05 )MnO 3 (YBM) thin films were deposited on Pt/Ti/SiO 2 /Si (100) substrates by pulsed laser deposition (PLD). The deposition conditions of oxygen partial pressure and cooling atmosphere have influences on the structural and ferroelectric properties of YBM thin films. Addition of Bi in YMnO 3 enhanced crystallization of YMnO 3 thin films. The c-axis oriented YBM thin films have been obtained on Pt at 700 C, which is lower than the typical deposition temperature of YMnO 3 thin films. YBM thin films deposited in oxygen partial pressure of 100 mTorr were strongly oriented along the c-axis. The hysteresis P-E loop and Capacitance-Frequency (C-F) characteristics of YBM thin films were studied. The dielectric constant and loss was 29 and 0.017 at 1 MHz, respectively.
| Original language | English |
|---|---|
| Pages (from-to) | 15-20 |
| Number of pages | 6 |
| Journal | Ferroelectrics |
| Volume | 271 |
| DOIs | |
| State | Published - 1 Jan 2002 |
Keywords
- (Y,Bi )MnO
- Crystallization
- Ferroelectric
- PLD