Structural study of amorphous vanadium oxide films for thin film microbattery

Research output: Contribution to journal › Article › peer-review

24 Scopus citations

Original language	English
Pages (from-to)	754-759
Number of pages	6
Journal	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume	21
Issue number	2
DOIs	https://doi.org/10.1116/1.1547746
State	Published - 2003
Externally published	Yes

Access to Document

@article{a778193db80244dba83182e74168a297,

title = "Structural study of amorphous vanadium oxide films for thin film microbattery",

author = "Kim, \{Han Ki\} and Seong, \{Tae Yeon\} and Yoon, \{Young Soo\}",

year = "2003",

doi = "10.1116/1.1547746",

language = "English",

volume = "21",

pages = "754--759",

journal = "Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures",

issn = "1071-1023",

publisher = "AVS Science and Technology Society",

number = "2",

}

TY - JOUR

T1 - Structural study of amorphous vanadium oxide films for thin film microbattery

AU - Kim, Han Ki

AU - Seong, Tae Yeon

AU - Yoon, Young Soo

PY - 2003

Y1 - 2003

UR - https://www.scopus.com/pages/publications/0037274077

U2 - 10.1116/1.1547746

DO - 10.1116/1.1547746

M3 - Article

AN - SCOPUS:0037274077

SN - 1071-1023

VL - 21

SP - 754

EP - 759

JO - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

JF - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

IS - 2

ER -