Structural characterization of strained (Ba0.5,Sr 0.5)TiO3 thin films grown on Si by synchrotron X-ray diffraction

Sungjin Jun; Sangsub Kim; Jungho Je; Jaichan Lee

doi:10.1080/10584580108016933

Structural characterization of strained (Ba_0.5,Sr _0.5)TiO₃ thin films grown on Si by synchrotron X-ray diffraction

Sungjin Jun
, Sangsub Kim
, Jungho Je
, Jaichan Lee

Department of Advanced Materials Science and Engineering

Research output: Contribution to journal › Conference article › peer-review

Abstract

Epitaxial (Ba0.5,Sr0.5)TiO3 (BST) thin films have been grown on Si substrate with a very thin yttria-stabilized zirconia (YSZ) buffer layer by pulsed-laser deposition. The epitaxially grown BST thin films experienced lattice distortion along the in-plane direction due to the tensile stress induced primarily by thermal stress during deposition. Crystallinity and microstructures of a strained BST thin films have been closely investigated using X-ray diffractometer, transmission electron microscope, and synchrotron X-ray.

Original language	English
Pages (from-to)	201-210
Number of pages	10
Journal	Integrated Ferroelectrics
Volume	38
Issue number	1-4
DOIs	https://doi.org/10.1080/10584580108016933
State	Published - 2001
Event	13th International Symposium on Integrated Ferroelectrics - Colorado Springs, CO, United States Duration: 11 Mar 2006 → 14 Mar 2006

Keywords

(Ba
Sr)TiO
Strain
Synchrotron X-ray

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10.1080/10584580108016933

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title = "Structural characterization of strained (Ba0.5,Sr 0.5)TiO3 thin films grown on Si by synchrotron X-ray diffraction",

abstract = "Epitaxial (Ba0.5,Sr0.5)TiO3 (BST) thin films have been grown on Si substrate with a very thin yttria-stabilized zirconia (YSZ) buffer layer by pulsed-laser deposition. The epitaxially grown BST thin films experienced lattice distortion along the in-plane direction due to the tensile stress induced primarily by thermal stress during deposition. Crystallinity and microstructures of a strained BST thin films have been closely investigated using X-ray diffractometer, transmission electron microscope, and synchrotron X-ray.",

keywords = "(Ba, Sr)TiO, Strain, Synchrotron X-ray",

author = "Sungjin Jun and Sangsub Kim and Jungho Je and Jaichan Lee",

year = "2001",

doi = "10.1080/10584580108016933",

language = "English",

volume = "38",

pages = "201--210",

journal = "Integrated Ferroelectrics",

issn = "1058-4587",

publisher = "Taylor and Francis Ltd.",

number = "1-4",

note = "13th International Symposium on Integrated Ferroelectrics ; Conference date: 11-03-2006 Through 14-03-2006",

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TY - JOUR

T1 - Structural characterization of strained (Ba0.5,Sr 0.5)TiO3 thin films grown on Si by synchrotron X-ray diffraction

AU - Jun, Sungjin

AU - Kim, Sangsub

AU - Je, Jungho

AU - Lee, Jaichan

PY - 2001

Y1 - 2001

N2 - Epitaxial (Ba0.5,Sr0.5)TiO3 (BST) thin films have been grown on Si substrate with a very thin yttria-stabilized zirconia (YSZ) buffer layer by pulsed-laser deposition. The epitaxially grown BST thin films experienced lattice distortion along the in-plane direction due to the tensile stress induced primarily by thermal stress during deposition. Crystallinity and microstructures of a strained BST thin films have been closely investigated using X-ray diffractometer, transmission electron microscope, and synchrotron X-ray.

AB - Epitaxial (Ba0.5,Sr0.5)TiO3 (BST) thin films have been grown on Si substrate with a very thin yttria-stabilized zirconia (YSZ) buffer layer by pulsed-laser deposition. The epitaxially grown BST thin films experienced lattice distortion along the in-plane direction due to the tensile stress induced primarily by thermal stress during deposition. Crystallinity and microstructures of a strained BST thin films have been closely investigated using X-ray diffractometer, transmission electron microscope, and synchrotron X-ray.

KW - (Ba

KW - Sr)TiO

KW - Strain

KW - Synchrotron X-ray

UR - https://www.scopus.com/pages/publications/34547768731

U2 - 10.1080/10584580108016933

DO - 10.1080/10584580108016933

M3 - Conference article

AN - SCOPUS:34547768731

SN - 1058-4587

VL - 38

SP - 201

EP - 210

JO - Integrated Ferroelectrics

JF - Integrated Ferroelectrics

IS - 1-4

T2 - 13th International Symposium on Integrated Ferroelectrics

Y2 - 11 March 2006 through 14 March 2006

ER -

Structural characterization of strained (Ba_0.5,Sr _0.5)TiO₃ thin films grown on Si by synchrotron X-ray diffraction

Abstract

Keywords

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