Structural and electrical analysis of silicon thin films deposited by transformer-coupled-plasma chemical-vapor deposition
- Hyoung Cheol Lee
- , Geun Young Yeom
- , Yoo Jin Lee
- , Jin Koog Shin
- , Sung Il Baik
- , Young Woon Kim
- Sungkyunkwan University
- Korea Electronics Technology Institute
- Seoul National University
Research output: Contribution to journal › Article › peer-review
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