Abstract
InGaN/GaN multiple quantum well-based blue light emitting diodes (LEDs) with different spacer layer structures were grown by metalorganic chemical vapor deposition. Fast-Fourier-transformed high-resolution transmission electron microscopy was used to determine the influence of the strain status in the spacer layer on Mg distribution and device performance. A comparison of the (1 1̄ 0 0) planar distance showed that the high-temperature grown InGaN layer in the spacer had a high level of stored strain. This led to the formation of a continuous facet contrast induced by Mg segregation in the p-layer, which was responsible for the deterioration of the electroluminescence performance of the LEDs. These results show that the delicate control of stored strain in nitride films is important for improving the device performance.
| Original language | English |
|---|---|
| Pages (from-to) | 2128-2132 |
| Number of pages | 5 |
| Journal | Journal of Crystal Growth |
| Volume | 312 |
| Issue number | 14 |
| DOIs | |
| State | Published - 1 Jul 2010 |
Keywords
- A3. Metalorganic chemical vapor deposition
- B1. Nitrides
- B2. Semiconducting IIIV materials
- B3. Light emitting diodes
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