Step Coverage in ALD

Sovan Kumar Panda; Hyunjung Shin

doi:10.1002/9783527639915.ch2

Step Coverage in ALD

Sovan Kumar Panda
, Hyunjung Shin

Kookmin University

Research output: Chapter in Book/Report/Conference proceeding › Chapter › peer-review

7 Scopus citations

Original language	English
Title of host publication	Atomic Layer Deposition of Nanostructured Materials
Publisher	Wiley-VCH
Pages	23-40
Number of pages	18
ISBN (Print)	9783527327973
DOIs	https://doi.org/10.1002/9783527639915.ch2
State	Published - 2 Jan 2012
Externally published	Yes

Keywords

Aspect ratio
Atomic layer deposition
Conformality
Exposure time
Step coverage
Sticking probability

Access to Document

10.1002/9783527639915.ch2

Cite this

@inbook{121090be97a645baa406a0d32787a543,

title = "Step Coverage in ALD",

keywords = "Aspect ratio, Atomic layer deposition, Conformality, Exposure time, Step coverage, Sticking probability",

author = "Panda, \{Sovan Kumar\} and Hyunjung Shin",

year = "2012",

month = jan,

day = "2",

doi = "10.1002/9783527639915.ch2",

language = "English",

isbn = "9783527327973",

pages = "23--40",

booktitle = "Atomic Layer Deposition of Nanostructured Materials",

publisher = "Wiley-VCH",

}

TY - CHAP

T1 - Step Coverage in ALD

AU - Panda, Sovan Kumar

AU - Shin, Hyunjung

PY - 2012/1/2

Y1 - 2012/1/2

KW - Aspect ratio

KW - Atomic layer deposition

KW - Conformality

KW - Exposure time

KW - Step coverage

KW - Sticking probability

UR - https://www.scopus.com/pages/publications/84884026914

U2 - 10.1002/9783527639915.ch2

DO - 10.1002/9783527639915.ch2

M3 - Chapter

AN - SCOPUS:84884026914

SN - 9783527327973

SP - 23

EP - 40

BT - Atomic Layer Deposition of Nanostructured Materials

PB - Wiley-VCH

ER -

Step Coverage in ALD

Keywords

Access to Document

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