Abstract
This letter reports the utility of using the sol-gel process for exploring the library of multicomponent ZnO-based oxides as an active layer of thin film transistors. We chose InGaZnO as a starting material and modulated the Ga content to examine the potential of this material. Increasing the Ga ratio from 0.1 to 1 brought about a dynamic shift in the electrical behavior from conductor to semiconductor. This exploratory work critically helped us fabricate a device with robust device performance (a mobility of 1∼2 cm2 V -1 s-1 for the 400 °C -sintered samples and 0.2 cm2 V-1 s-1 for the 300 °C -sintered samples).
| Original language | English |
|---|---|
| Article number | 012108 |
| Journal | Applied Physics Letters |
| Volume | 95 |
| Issue number | 1 |
| DOIs | |
| State | Published - 2009 |
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