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Single photomask lithography for shape modulation of micropatterns

  • Sang Hun Lee
  • , Sung Eun Seo
  • , Kyung Ho Kim
  • , Jiyeon Lee
  • , Chul Soon Park
  • , Bong Hyun Jun
  • , Seon Joo Park
  • , Oh Seok Kwon

Research output: Contribution to journalArticlepeer-review

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Material Science