Abstract
We report the growth of single-crystalline GaN microdisk arrays on graphene and their application in flexible light-emitting diodes (LEDs). Graphene layers were directly grown on c-sapphire substrates using chemical vapor deposition and employed as substrates for GaN growth. Position-controlled GaN microdisks were laterally overgrown on the graphene layers with a micro-patterned SiO2 mask using metal-organic vapor-phase epitaxy. The as-grown GaN microdisks exhibited excellent single crystallinity with a uniform in-plane orientation. Furthermore, we fabricated flexible micro-LEDs by achieving heteroepitaxial growth of n-GaN, Inx Ga1−x N/GaN multiple quantum wells, and p-GaN layers on graphene-coated sapphire substrates. The GaN micro-LED arrays were successfully transferred onto bendable substrates and displayed strong blue light emission under room illumination, demonstrating their potential for integration into flexible optoelectronic devices.
| Original language | English |
|---|---|
| Article number | 085603 |
| Journal | Nanotechnology |
| Volume | 35 |
| Issue number | 8 |
| DOIs | |
| State | Published - 19 Feb 2024 |
Keywords
- flexible device
- GaN
- graphene
- micro-LEDs
- MOVPE