Silicon nitride deposition for flexible organic electronic devices by VHF (162 MHz)-PECVD Using a Multi-Tile Push-Pull Plasma Source
- Ki Seok Kim
- , Ki Hyun Kim
- , You Jin Ji
- , Jin Woo Park
- , Jae Hee Shin
- , Albert Rogers Ellingboe
- , Geun Young Yeom
- Sungkyunkwan University
- Dublin City University
Research output: Contribution to journal › Article › peer-review
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