Semi-Metal Edge Contact for Barrier-Free Carrier Transport in MoS2 Field Effect Transistors

Sungwon Lee, Xinbiao Wang, Hoseong Shin, Nasir Ali, Tien Dat Ngo, Euyheon Hwang, Gil Ho Kim, Geun Young Yeom, Kenji Watanabe, Takashi Taniguchi, Won Jong Yoo

Research output: Contribution to journalArticlepeer-review

8 Scopus citations

Abstract

The high contact resistance (Rc) arising at the interface between a metal and a two-dimensional (2D) material presents a significant challenge to carrier transport in semiconductor devices based on 2D materials. The van der Waals gap and metal-induced gap states formed at the 2D interface give rise to an uncontrollable Schottky barrier, resulting in a high Rc. In this study, we report the achievement of very low Rc and ohmic behavior of molybdenum disulfide (MoS2) field-effect transistors through the implementation of the edge contacts using semimetallic antimony (Sb). Our findings reveal that the edge contacts formed with Sb facilitate barrier-free carrier injection at the interface of MoS2 devices, leading to highly efficient charge transport at room temperature, resulting in an unexpectedly further lowered Rc (600 Ω·μm) at 10 K with a negligible Schottky barrier height. Further support for barrier-free ohmic transport is provided by density functional theory simulations, confirming that semimetallic Sb exhibits a very low density of states (DOS), with the Fermi level aligning well with the DOS of MoS2. Additionally, a comparison of linearity in output I-V characteristics with other metals confirms the superiority of the Sb edge contacts.

Original languageEnglish
Pages (from-to)4149-4158
Number of pages10
JournalACS Applied Electronic Materials
Volume6
Issue number6
DOIs
StatePublished - 25 Jun 2024

Keywords

  • 2D molybdenum disulfide
  • contact resistance
  • edge contact
  • ohmic behavior
  • plasma etching
  • transmission line measurement

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