Self-Heating Gas Sensor Using Heterojunction Nanowire Array for High Sensitivity and Low Power Consumption

  • Sung Ho Kim
  • , Min Seung Jo
  • , So Yoon Park
  • , Kwang Wook Choi
  • , Sang Hee Kim
  • , Jae Young Yoo
  • , Beom Jun Kim
  • , Jun Bo Yoon

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

This paper reports a novel heterojunction nanowire array for a self-heating gas sensor with high sensitivity and low power consumption. Compared to the conventional self-heating gas sensors where the entire device is made up of a single sensing material, the proposed method employs an innovatively constructed metal/metal-oxide/metal (M-O-M) heterojunction design. The metal nanowires on both ends of the metal-oxide nanowires not only elongate the thermal heat loss pathway but also allow thermal activation at the sensing region to its entirety, resulting in low power consumption and high/stable gas responsivity. We theoretically and experimentally demonstrated that the proposed design operates with about 5-times lower power consumption when compared to that of the conventional design. Additionally, in comparison to its predecessor, the heterojunction architecture achieved about 2.5-times higher sensitivity while also showing stable recovery after each exposure to toxic gas.

Original languageEnglish
Title of host publication2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages2181-2184
Number of pages4
ISBN (Electronic)9784886864352
StatePublished - 2023
Externally publishedYes
Event22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023 - Kyoto, Japan
Duration: 25 Jun 202329 Jun 2023

Publication series

Name2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023

Conference

Conference22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023
Country/TerritoryJapan
CityKyoto
Period25/06/2329/06/23

Keywords

  • Gas sensor
  • heterojunction
  • low power consumption
  • nanowire
  • uniform temperature distribution

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