Abstract
Recently, high-resolution patterned metal oxide semiconductors (MOS) have gained considerable attention for enhanced gas sensing performance due to their polycrystalline nature, ultrasmall grain size (~5 nm), patternable properties, and high surface-to-volume ratio. Herein, we significantly enhanced the sensing performance of that patterned MOS by galvanic replacement, which allows for selective functionalization on ultrathin Cu2 O nanopatterns. Based on the reduction potential energy difference between the base channel material (Cu2 O) and the decorated metal ion (Pt2+), Pt could be selectively and precisely decorated onto the desired area of the Cu2 O nanochannel array. Overall, the Pt-decorated Cu2 O exhibited 11-fold higher NO2 (100 ppm) sensing sensitivity as compared to the non-decorated sensing channel, the while the channel device with excessive Pt doping showed complete loss of sensing properties.
| Original language | English |
|---|---|
| Article number | 4438 |
| Journal | Sensors |
| Volume | 18 |
| Issue number | 12 |
| DOIs | |
| State | Published - Dec 2018 |
| Externally published | Yes |
Keywords
- Chemical sensitization
- Galvanic replacement
- Gas sensor
- High-resolution
- Nanopattern
- P-type metal oxide
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