Selective deposition of hafnium oxide nanothin films on OTS patterned Si(100) substrates by metal-organic chemical vapor deposition

Soft lithography is a method for the manufacture of micro/nano size patterns and structures by using organic materials without the use of high energy. In particular, microcontact printing (μCP) is a very convenient and nonphotolithographic technique that can generate patterned features of self-assembled monolayers (SAMs). In this study, we carried out the selective deposition of HfO₂ nano-thin films on Si(100) substrates by combination of μCP using octadecyltrichlorosilane (OTS) and metal-organanic chemical vapor deposition (MOCVD). Single molecular precursor of Hf(O ^tBu)₄ was used for the growth of HfO₂ nano-films, and the deposition was carried out between 150°C and 400°C at a pressure of 3 × 10^-2 torr. The as-grown films were characterized by x-ray diffraction (XRD), optical microscopy (OM), scanning electron microscopy (SEM), energy dispersive x-ray (EDX), x-ray photoelectron spectroscopy (XPS), and capacitance-voltage (C-V) and current-voltage (I-V) measurement. It is expected that the combination of μCP of SAM and MOCVD is a better method for fabricating the HfO₂ thin films between micro and nano sizes.