Seeded growth of highly crystalline molybdenum disulphide monolayers at controlled locations

Monolayer transition metal dichalcogenides are materials with an atomic structure complementary to graphene but diverse properties, including direct energy bandgaps, which makes them intriguing candidates for optoelectronic devices. Various approaches have been demonstrated for the growth of molybdenum disulphide (MoS₂) on insulating substrates, but to date, growth of isolated crystalline flakes has been demonstrated at random locations only. Here we use patterned seeds of molybdenum source material to grow flakes of MoS₂ at predetermined locations with micrometre-scale resolution. MoS₂ flakes are predominantly monolayers with high material quality, as confirmed by atomic force microscopy, transmission electron microscopy and Raman and photoluminescence spectroscopy. As the monolayer flakes are isolated at predetermined locations, transistor fabrication requires only a single lithographic step. Device measurements exhibit carrier mobility and on/off ratio that exceed 10cm² V^-1 s^-1 and 10⁶, respectively. The technique provides a path for in-depth physical analysis of monolayer MoS₂ and fabrication of MoS₂-based integrated circuits.