Residual stress relaxation and property modifications of polysilicon films by ion implantation
- Ji Won Suk
- , Tae June Kang
- , Sang Jun Lee
- , Jae H. Lee
- , Jae S. Lee
- , Jun Hee Hahn
- , Ho Young Lee
- , Young Keun Chang
- , Yong Hyup Kim
Research output: Contribution to journal › Article › peer-review
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