Residual stress change by thermal annealing in amorphous Sm-Fe-B thin films

The residual stress change was investigated by thermal annealing in amorphous Sm-Fe-B thin films as a function of annealing temperature. Two stress components of intrinsic compressive stresses and tensile stress due to the difference of thermal expansion coefficient between the substrate and thin films was used to explain the stress state in as-deposited thin films. The annealing temperature dependence of residual stress, mechanical bending and magnetic properties were also investigated.