Removal of aspect-ratio-dependent etching by low-angle forward reflected neutral-beam etching
- Do Haing Lee
- , Byoung Jae Park
- , Geun Young Yeom
- , Sung Jin Kim
- , Jae Koo Lee
- , Kye Hyun Baek
- , Chang Jin Kang
Research output: Contribution to journal › Article › peer-review
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