TY - JOUR
T1 - Reliability analysis framework for time dependent dielectric breakdown
AU - Park, Kiron
AU - Im, Sujin
AU - Park, Keonho
AU - Son, Kwonjoo
AU - Hong, Seungeui
AU - Jeon, Jongwook
N1 - Publisher Copyright:
© 2020, Institute of Electronics Engineers of Korea. All rights reserved.
PY - 2020/2
Y1 - 2020/2
N2 - In this study, we develop a time-dependent dielectric breakdown (TDDB) analysis framework. TDDB is an important failure mechanism in transistor devices, which are widely used in electrical equipment, including power applications. In the developed TDDB framework, the percolation path can be predicted according to the thickness of the gate insulator, temperature, and electric-field strength applied to the gate insulating layer by considering three major degradation mechanisms that generate TDDB: anode hole injection, anode hydrogen release, and the thermochemical mechanism. This technique can be used to predict the device lifetime for different stress temperatures, biases, and application times. Thus, the developed framework can be used in industries to derive accelerated-lifetime testing conditions and to analyze the warranty period.
AB - In this study, we develop a time-dependent dielectric breakdown (TDDB) analysis framework. TDDB is an important failure mechanism in transistor devices, which are widely used in electrical equipment, including power applications. In the developed TDDB framework, the percolation path can be predicted according to the thickness of the gate insulator, temperature, and electric-field strength applied to the gate insulating layer by considering three major degradation mechanisms that generate TDDB: anode hole injection, anode hydrogen release, and the thermochemical mechanism. This technique can be used to predict the device lifetime for different stress temperatures, biases, and application times. Thus, the developed framework can be used in industries to derive accelerated-lifetime testing conditions and to analyze the warranty period.
KW - Degradation
KW - Dielectric breakdown
KW - Oxide dielectric
KW - Reliability
KW - Time dependent dielectric breakdown(TDDB)
UR - https://www.scopus.com/pages/publications/85081045939
U2 - 10.5573/JSTS.2020.20.1.019
DO - 10.5573/JSTS.2020.20.1.019
M3 - Article
AN - SCOPUS:85081045939
SN - 1598-1657
VL - 20
SP - 19
EP - 28
JO - Journal of Semiconductor Technology and Science
JF - Journal of Semiconductor Technology and Science
IS - 1
ER -