Realization of Nanolene: A Planar Array of Perfectly Aligned, Air-Suspended Nanowires

Air suspension and alignment are fundamental requirements to make the best use of nanowires' unique properties; however, satisfying both requirements is very challenging due to the mechanical instability of air-suspended nanowires. Here, a perfectly aligned air-suspended nanowire array called “nanolene” is demonstrated, which has a high mechanical stability owing to a C-channel-shaped cross-section of the nanowires. The excellent mechanical stability is provided through geometrical modeling and finite element method simulations. The C-channel cross-section can be realized by top-down fabrication procedures, resulting in reliable demonstrations of the nanolenes with various materials and geometric parameters. The fabrication process provides large-area uniformity; therefore, nanolene can be considered as a 2D planar platform for 1D nanowire arrays. Thanks to the high mechanical stability of the proposed nanolene, perfectly aligned air-suspended nanowire arrays with an unprecedented length of 1 mm (aspect ratio ≈5100) are demonstrated. Since the nanolene can be used in an energy-efficient nanoheater, two energy-stringent sensors, namely, an air-flow sensor and a carbon monoxide gas sensor, are demonstrated. In particular, the gas sensor achieves sub-10 mW operations, which is a requirement for application in mobile phones. The proposed nanolene will pave the way to accelerate nanowire research and industrialization by providing reliable, high-performance nanowire devices.