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Properties of an Internal U-Shaped Inductively Coupled Plasma Source Operated by Superimposed Dual Frequency

  • Do Han Kim
  • , Tae Hyung Kim
  • , Soo Jung Lee
  • , Won Oh Lee
  • , Kyong Nam Kim
  • , Geun Young Yeom
  • Sungkyunkwan University
  • Daejeon University

Research output: Contribution to journal › Article › peer-review

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