Preparation and characterization of sprayed in ₂O ₃:Mo films

Transparent conducting oxides (TCO) play a major role in the area of thin film photovoltaics, flat panel displays, organic light emitting diodes and other optoelectronic devices. In order to improve the performance of a device, the TCO should have good optical transmittance as well as conductivity. In the present study, In ₂O ₃:Mo films have been grown by an economic and simple spray pyrolysis method with different molybdenum doping concentrations that vary in the range, 0-12 at% at a substrate temperature of 400 °C. The structural and morphological, electrical and optical behaviour of the as-grown layers were studied. All the deposited layers showed a body-centered cubic structure with a strong (222) orientation. In ₂O ₃ : Mo films grown with Mo-concentration of 6.0 at% had the maximum grain size of 90 mn. The average optical transmittance of the films was >85% in the visible region. The change of grain size, electrical resistivity, carrier mobility and density, optical band gap and figure of merit with doping concentration was reported and discussed.